Processing system, machining process and storage medium

摘要

Processing system, which includes:a treatment container, which is configured to a signal to be processed object in a machining chamber to receive;a treating fluid - generating part, which is configured, in order to produce the machining fluid a predetermined temperature;a main line, which is connected with the treating fluid - generating part, wherein the main line is configured to the treating fluid from the treating fluid - generating part is supplied, lead to;a treating fluid - supply line, which is fitted to a downstream side of the main line, via a changeover valve is arranged, wherein the treating fluid - supply line is configured so the treating fluid to be introduced into the treatment container, that the treating fluid to the machining chamber is supplied in the treatment container; anda treating fluid - bypass line, the on the downstream side of the main line via the change-over valve is arranged, wherein the treating fluid - bypass line is configured in order to guide a treating fluid, which is not used for treating fluid - supply line is introduced, in order to circumvent the machining space;in the case of which the main line to a flow rates - adjusting mechanism for adjusting a flow rate of the machining fluid, which flows through the main line, is provided..