They ethyl 1-cyclopropyl-7-fluoro-8-trifluoromethyl-1,4-dihydro-4-oxo-3-quinolinecarboxylate control system

摘要

It is as a percent of the elements of a system for processing of an object (3) is provided, which is designed for this purpose, a first energy beam, in particular an electron beam (11), and a second energy beam, in particular an ion beam (21), to a focus, while (29), in which an article that is to object (3) is locatable. As a percent of the bore-hole chamber wall (35), which two openings (38, 39) for the passage of the two energy rays, and a connection (37) for supplying a process gas, it is a percent storage chamber (45) of a vacuum chamber (2) of the ethyl 1-cyclopropyl-7-fluoro-8-trifluoromethyl-1,4-dihydro-4-oxo-3-quinolinecarboxylate they control system. A processing of the object by activation of the process gas by one of the energy rays and an inspection of the object by one of the energy rays, in the case of different orientations of the object relative to a direction of propagation of the possible energy beams.