Surface topology i.e. sharp projection, detection device for planar sample i.e. micro fluid sample, in semiconductor technology, has sensor e.g. camera, evaluating combination of preimage or reference image and reflected image of sample

摘要

The device has a projection unit for projection of a preimage (2) or a reference image on a sample (5). An image sensor e.g. camera (10), evaluates a combination of the preimage or the reference image and a reflected image of the sample. Projection lens (4) accomodates the preimage reflected by the sample and transfers to the evaluation unit. The projection lens has a beam splitter (3), and a light source (1) arranged vertically over the sample. The evaluation unit is arranged laterally beside an optical path. An independent claim is also included for a method for detection of a surface topology.