Illuminating system for use in projection exposure system, has curved field generation module with optically active surfaces which are designed such that curved light-bundle is formed by stream deflection of incident light-bundle

摘要

The system (7) has a curved field generation module (15) with two optically active surfaces, which run steadily over an aperture along main extension direction, where the aperture is formed by the incident illumination light-bundle. The surfaces are designed such that a curved illumination light-bundle is formed by stream deflection of the incident illumination light-bundle. The field generation module comprises two optical components comprising optically operative surfaces, which run parallel to a bundle center stream (10). An independent claim is also included for a method for manufacturing a micro structured component with a projection exposure system.