device for increasing the individual comfort in an aircraft

摘要

The present invention relates to a sensor element for measuring pressure, which is a substrate and at least has a mass element, which is arranged at a distance from the substrate and, with the substrate and / or a relative to the substrate is connected to the stationary support body, so that between the mass element and the substrate is a gap, the width can be varied by oscillations of the mass element. In the surface of the substrate, which delimit the gap is located at least one recess and / or at least one carrying out, for the reduction of the damping of the oscillation of the mass element by means of which the mass element surrounding gas or plasma serves.The sensor element, in particular application in pressure sensors for measurement of pressures in the vacuum region vo. Due to the use of the sensor element according to the invention as a pressure sensor can be maximum pressures of up to into the region of the atmospheric air pressure detecting. The lowest pressures are to be determined in the range of 10 - 6 mbar.