NANOMETRICALLY OR MICROMETRICALLY VIBRANT ELECTROMECHANICAL COMPONENT WITH INCREASED DETECTION LEVEL

摘要

It is an electromechanical component vibrating at the nanoscale or micrometric scale comprising a vibrating mechanical element (1) which cooperates with at least one so-called detection electrode (2). The detection electrode (2) is flexible and is intended to vibrate in phase opposition with respect to the vibrating mechanical element (1) .Application to resonators or motion sensors.