FILM THICKNESS MEASURING INSTRUMENT AND METHOD OF MEASURING FILM THICKNESS

摘要

PPROBLEM TO BE SOLVED: To provide a film thickness measuring instrument and a method of measuring a film thickness for measuring a film thickness by a simple structure. PSOLUTION: The film thickness measuring instrument as one mode includes: a picture element row storage means for therein storing a picture element row corresponding to a lighted area in which light reflected by a surface of a transparent film or light reflected by an interface thereof is applied to a light receiving surface of a two-dimensional array light detector according to the position of a photo-transforming means; a focus height scanning means for scanning a focus height above a specimen; a measurement data storing means 101 for therein storing a signal based on light detected in the element row corresponding to the lighted area in association with the focus height; a reference function storing means 102 for therein storing a reference function referred to for finding the optical film thickness of the transparent film by the storing means 101 with the focus height used as a parameter, and a calculation means 105 for calculating the optical film thickness of the thin film by the least square method based on the reference function and measured data. PCOPYRIGHT: (C)2011,JPO&INPIT