PROBLEM TO BE SOLVED: To provide a polymerizable polymer which can be subjected to development process with an aqueous alkaline solution.;SOLUTION: The polymer is prepared by polymerizing a monomer represented by formula (I) [wherein R1 is H or CH3, A1 and A2 are a 1-4C alkylene group or a single bond, B1 is OH or COOH, X1 is a 1-18C alkylene, a 1-18C alkylene having C=O on the phenoxy side terminal, a 1-18C alkylene having a 1-6C alkylene bonded with the terminal opposite to the phenoxy side via a -COO- group, or a 1-18C alkylene having 1 to 10 -C2H4O- groups on the terminal opposite to the phenoxy side, and a and b are each an integer satisfying a+b=0 to 2] and a monomer represented by formula (II) [wherein R2 is H or CH3, A3 and A4 are a 1-4C alkylene, -COO- or a single bond, Z1 to Z3 are a hydrogen, a halogen, CN, a 1-18C alkyl, or a 1-4C alkoxy, X2 is a 1-18C alkylene, and c and d are each an integer satisfying c+d=0 to 2], reacting it with an epoxy group and an ethylenic double bond-containing compound, and esterifying it with a carboxylic acid anhydride.;COPYRIGHT: (C)2010,JPO&INPIT
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机译:解决的问题:提供一种可与碱性水溶液进行显影工艺的可聚合聚合物。;解决方案:该聚合物是通过聚合式(I)表示的单体制备的,其中R 1 Sub >是H或CH 3 Sub>,A 1 Sub>和A 2 Sub>是1-4C亚烷基或单键,B 1 Sub>是OH或COOH,X 1 Sub>是1-18C亚烷基,苯氧基侧端具有C = O的1-18C亚烷基,具有1-6C的1-18C亚烷基亚烷基通过-COO-与苯氧基侧相反的末端键合,或具有1至10个-C 2 Sub> H 4 Sub> O-基团的1-18C亚烷基与苯氧基侧相反的末端,a和b分别为满足a + b = 0至2的整数]和由式(II)表示的单体[其中R 2 Sub>为H或CH < Sub> 3 Sub>,A 3 Sub>和A 4 Sub>是1-4C亚烷基-COO-或单键Z 1 Sub >到Z 3 Sub>是氢,卤素,CN,1-18C烷基,o ra 1-4C烷氧基,X 2 Sub>是1-18C亚烷基,c和d分别是满足c + d = 0至2]的整数,使它与环氧基和亚乙基双含键的化合物,并用羧酸酐酯化。;版权所有:(C)2010,日本特许会计师事务所
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