METHOD FOR APPOINTING ORIENTATION FLAT, APPARATUS FOR DETECTING ORIENTATION FLAT, AND PROGRAM FOR APPOINTING ORIENTATION FLAT

摘要

PROBLEM TO BE SOLVED: To provide a method for appointing orientation flat surely appointing one of orientation flats of the same length as a reference orientation flat regardless of mixed presence of a plurality of orientation flats of the same length.;SOLUTION: In the method for appointing orientation flat, a semiconductor wafer W is rotated to respectively detect three orientation flats 1, 2, 3, the length of each of three arcs 1, 2, 3 between three orientation flats 1, 2, 3 is obtained, and then the orientation flat on the right side of the arc 2 which is the longest in three arcs 1, 2, 3 is appointed as the reference orientation flat. Therefore, the reference orientation flat is surely appointed regardless of mixed presence of the arcs of the same length.;COPYRIGHT: (C)2011,JPO&INPIT