METHOD FOR APPOINTING ORIENTATION FLAT, APPARATUS FOR DETECTING ORIENTATION FLAT, AND RECORDING MEDIUM HAVING PROGRAM FOR APPOINTING ORIENTATION FLAT RECORDED THEREIN

摘要

the present invention is the same as the length of the orientation flat is mixed to a plurality of the same length, even if any one of the orientation flat of the to provide a method that can reliably specify the orientation flat as a reference to specify the orientation flat as a challenge. Specify how the orientation flat of the present invention, by rotating the semiconductor wafer (W) of the three positions the orientation flat 1, 2, 3, respectively, detected, and the orientation flat of the three positions 1, 2 and 3 points in the arc of between 3 1, 2, and 3 of the length determined, respectively, of three circular arc portions 1 and 2, because the designated three of the orientation flat in the right side of the circle 2 of the length of the longest orientation flat as a reference, a plurality of arc of the same length there may also be sure to specify the criteria orientation flat. ;