METHOD FOR PRODUCING MICROSTRUCTURE, ASSEMBLY THEREOF, MICROSTRUCTURE, REFORMER, APPARATUS FOR GENERATING MICROPLASMA, SENSING DEVICE FOR DETECTING GAS, ACTUATOR, AND PRESSURE SENSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a microstructure, with which the homogeneous microstructure having a desired shape can be formed.;SOLUTION: A base material 1 having a plurality of projecting parts 5 on the surface thereof is arranged such that the direction 4 of each projecting part 5 on the surface of the base material 1, which is determined by the tip of each projecting part, is biased from an opposing direction with respect to the incident direction of a particle 3 to be deposited by evaporation, and a material to be deposited by evaporation is grown. As a result, the structure of the material to be deposited by evaporation is grown from the tip of each projecting part 5 to form an assembly of physically independent microstructures 2 in which individual structures are isolated from one another by gaps.;COPYRIGHT: (C)2010,JPO&INPIT