LASER SPECTROSCOPIC ANALYZER, AND LASER SPECTROSCOPIC ANALYZING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a laser spectroscopic analyzer capable of specifying the position of a minute analyzing place having unevenness with high precision to perform spectroscopic analysis, and a laser spectroscopic analyzing method using the same.;SOLUTION: The scanning electron beam emitted from an electron gun 2 is adjusted in its direction by a deflection coil 3 to irradiate the sample 1 placed on a sample stage 11 and the secondary electrons produced from the sample 1 are captured by a secondary electron detector 4. At the same time, the sample 1 is irradiated with the laser beam 13 emitted from a laser beam source 5 and only a Stokes Raman beam is selectively applied to a spectroscope 9 from the laser beams of various wavelengths produced from the sample 1 by an iris 7 and a filter 8 to be measured by a photomultiplier 10. Since having the function of a scanning electron microscope, this microscopic Raman spectroscopic analyzer can specify the analyzing place with high precision.;COPYRIGHT: (C)2010,JPO&INPIT