PERMEABILITY MEASUREMENT DEVICE OF MAGNETIC SUBSTANCE AND PERMEABILITY MEASUREMENT METHOD OF MAGNETIC SUBSTANCE

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for measuring permeability of magnetic substance capable of measuring permeability of magnetic substance with any size and shape, directly evaluating permeability without applying cutting or processing to a wafer and the like on a production process line, and significantly improving productivity on-sites of a production line or material development.;SOLUTION: The device has a structure wherein a dielectrics or an insulator is sandwiched with a conductor and a ground conductor, and a magnetic substance is electrically contacted with the conductor and the ground conductor or the conductor. A magnetic field is applied by a magnetic field applying section from the conductor to the magnetic substance, and a difference of amplitude information or complex information of a signal due to presence or absence of the magnetic field applied by the magnetic field applying section is measured by a signal measuring apparatus. A permeability of a magnetic substance is determined by optimization processing from a difference between the signal measured by the signal measuring apparatus.;COPYRIGHT: (C)2010,JPO&INPIT