Magnetic permeability measurement device and magnetic material permeability measurement method

摘要

PROBLEM TO BE SOLVED: To provide a magnetic substance permeability-measuring device and a magnetic substance permeability-measuring method, that can measure a permeability of a magnetic substance of an arbitrary size and shape, and can evaluate a distribution of permeability within a wafer, in the wafer or the like on a production process line.SOLUTION: There is provided a probe including: a microstrip conductor that is configured to sandwich a dielectric body by a microstrip conductor 3 and a ground conductor 4; a magnetic substance that is caused to be tightly adhered to the microstrip conductor via an insulator; a through-hole 6 that is connected to an end part of the microstrip conductor inside the dielectric body; and an electric lead-out line connected to the through-hole 6. There is provided a magnetic substance permeability-measuring device including: the probe; a magnetic field application unit for applying a magnetic field to the magnetic substance; a signal measuring instrument that measures a difference in amplitude information or complex information on a signal depending upon presence or absence of the magnetic field application by the magnetic field application unit; and processing means that obtains, by optimization processing, a permeability of the magnetic substance from the difference in the signal measured by the signal measuring instrument.