LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD UTILIZING CONTINUOUS LIGHT BEAM IN COMBINATION WITH PIXEL GRID DRAWING

摘要

PROBLEM TO BE SOLVED: To provide a lithographic apparatus and a device manufacturing method utilizing a continuous light beam in combination with pixel grid imaging.;SOLUTION: A continuous source of radiation such as a lamp, for example, is used in conjugation with pixel grid imaging. In one embodiment, an individually-controllable element is operated at a frequency of at least about 50 kHz. To compensate for the distortion of an exposed spot, a point spread function is adjusted to be shorter in a scanning direction.;COPYRIGHT: (C)2010,JPO&INPIT