SENSOR UNIT, TERAHERTZ SPECTRAL MEASUREMENT APPARATUS, AND TERAHERTZ SPECTRAL MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a sensor unit for preventing a terahertz light from being affected by a spectral absorption due to a steam, and improving the measurement accuracy, a terahertz spectral measurement apparatus, and a terahertz spectral measurement method.;SOLUTION: The sensor unit 10 is formed with a light-emitting element section 11, having a LT-GaAs substrate 112 for emitting the terahertz light; a light-receiving element section 12 having a LT-GaAs substrate 122 for receiving the terahertz light, and detecting a detection signal; and a flow path 13 in which the light-emitting element section 11 and the light receiving element section 12 are bonded to each other, and a sample S flows between the light-emitting element section 11 and the light-receiving element section 12.;COPYRIGHT: (C)2010,JPO&INPIT