METHOD FOR PRODUCING NANO-PERIODIC STRUCTURE ON SURFACE OF DIELECTRIC MATERIAL

摘要

PPROBLEM TO BE SOLVED: To provide a method for producing a super-fine nano-periodic structure for surface modification of a dielectric material. PSOLUTION: A first ultraviolet ray beam or visible light beam 5 and a second light beam 16 as the ultrashort pulsed laser beam are simultaneously applied to a surface of a dielectric material as a workpiece. Free electrons are generated on a surface of the dielectric material by applying the first light beam 5, and preferably, plasmon is generated by applying the second light beam 16 to form a nano-periodic structure on a surface of the dielectric material. The workpiece includes glass, organic polymer, ceramic, diamond or boron nitride. Further, when a metal or a semiconductor is added into the dielectric material or to a surface thereof, free electrons are distributed in advance in a vicinity of the surface to efficiently generate plasmon. An embodiment is possible, in which the second light beam 16 is formed of fundamental waves of the output of the ultrashort pulsed laser beam, and the first light beam 5 is formed of harmonic waves converted by a non-linear optical element or the like. PCOPYRIGHT: (C)2010,JPO&INPIT