OPTICAL ELEMENT AND METHOD FOR MANUFACTURING THE SAME, NIPKOW DISK, CONFOCAL OPTICAL SYSTEM, AND THREE-DIMENSIONAL MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical element in which, at least a part of the element, increases an effect of reducing reflection noise can be enhanced while obtaining a light-shielding property.;SOLUTION: The optical element comprises a substrate 11 having a first fine concavo-convex structure MR1 including a great number of minute projections CP1 formed on one surface, a metal layer 12 covering the first fine concavo-convex structure MR1, and a film 13 having a second fine concavo-convex structure MR2 including a great number of minute projections CP2, the film 13 made of silicon or a resin and formed in the opposite side of the metal layer 12 to the substrate 11.;COPYRIGHT: (C)2010,JPO&INPIT