PROCESS FOR MANUFACTURING INTEGRATED MEMBRANE OF NOZZLES IN MEMS TECHNOLOGY FOR SPRAY DEVICE AND SPRAY DEVICE USING THE INTEGRATED MEMBRANE

摘要

PROBLEM TO BE SOLVED: To provide a process for manufacturing integrated membrane of nozzles in MEMS technology and a spray device including the membrane without defects of conventional technology.;SOLUTION: The process for manufacturing a membrane of nozzles of a spray device, comprises the steps of laying a substrate (11), forming a membrane layer (13) on the substrate (11), forming a plurality of nozzles (14) in the membrane layer (13), forming a plurality of supply channels (15) in the substrate (11), each supply channel (15) being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles (14) and directly communicating with the respective nozzle (14).;COPYRIGHT: (C)2010,JPO&INPIT