METHOD AND SYSTEM FOR COMBINATORIALLY VARYING MATERIAL, UNIT PROCESS AND PROCESS SEQUENCE

摘要

PPROBLEM TO BE SOLVED: To provide a method that can more efficiently screen and analyze an array of materials, processes, and process sequence integration schemes across a substrate. PSOLUTION: The method for analyzing and optimizing a processing technology using variations of materials, unit processes, and process sequences is provided. In the method, a subset of a semiconductor manufacturing process sequence and a structure is analyzed for optimization. During the execution of the subset of the manufacturing process sequence, the materials, unit processes, and process sequences for creating a certain structure are varied. During combinatorial processing, the materials, unit processes, or process sequences are varied between discrete regions of a semiconductor substrate. In each of the regions, the process yields a substantially uniform or consistent result that is representative of a result of a commercial manufacturing operation. A tool for optimizing the process sequence is also provided. PCOPYRIGHT: (C)2010,JPO&INPIT