METHOD AND DEVICE FOR MEASURING MAIN AXIS ELECTRIC RESISTIVITY OF TWO-DIMENSIONAL AND THREE-DIMENSIONAL ANISOTROPIC SUBSTANCES BY MULTIPOINT VOLTAGE-CURRENT PROBE METHOD

摘要

PROBLEM TO BE SOLVED: To measure main axis electric resistivity and a main axis angle of a two-dimensional and three-dimensional anisotropic substances by a main axis electric resistivity measuring method of the two-dimensional and three-dimensional anisotropic substances by a multipoint voltage-current probe method.;SOLUTION: A dot-like positive current source impression point is arranged in the vicinity of a central part of a measuring sample, and at the same time, different negative current impression points are arranged on equal angle three axes, and when adding an electric current to the positive and negative current impression points, the electric current constitutes an electric field characteristic of the substance by flowing by reflecting a characteristic of the two-dimensional and three-dimensional anisotropic substances. Here, in the two-dimensional anisotropic substance, a voltage drop in a surface of the different equal angle three axes on a surface of the two-dimensional anisotropic substance is measured, and its main axis electric resistivity and the main axis angle are simultaneously measured by one-time measuring operation by using a theoretical expression from the measured electric resistivity on the equal angle three axes. In the three-dimensional anisotropic substance, the main axis electric resistivity and the main axis angle can be simultaneously, accurately and separately measured by one-time measuring operation by expanding and applying the method.;COPYRIGHT: (C)2010,JPO&INPIT