DUAL ARM SUBSTRATE HANDLING ROBOT WITH BATCH LOADER

摘要

PPROBLEM TO BE SOLVED: To provide an improved technique for a robotic bulk transfer of substrates. PSOLUTION: A substrate handling robot 20 includes an arm drive mechanism 34 to which a first arm 22 and a second arm 26 are connected. A multiple substrate batch loader 24 is connected to the first arm 22. A single plane end effector 28 is connected to the second arm 26. The multiple substrate batch loader 24 produces a vacuum signal indicative how many substrates are held thereby. A vacuum signal interpreter alters the movement of the first arm 22 in response to the substrate load number. An object sensor 58 connected to the second arm 26 assesses the number of substrates in a cassette adjacent to the multiple substrate batch loader 24. A substrate loading sequence controller controls the movements of the arms in response to the number of substrates in the cassette, to facilitate complete loading of the multiple substrate batch loader 24. PCOPYRIGHT: (C)2011,JPO&INPIT