PROCESS CONDITION CALCULATION DEVICE, PROCESS CONDITION CALCULATION METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND PROCESS CONDITION CALCULATION PROGRAM

摘要

PROBLEM TO BE SOLVED: To calculate margin ranges of a process condition for a plurality of patterns to be processed in a lump.;SOLUTION: A difference calculation portion 17a calculates differences between target values of sizes of a plurality of patterns and measured values of sizes after a process of generating the plurality of patterns in a lump, a size variance calculation portion 17c calculates variances in size of the respective patterns when the process condition is changed based upon calculation results of the differences between the target values of the sizes of the respective patterns calculated by the difference calculation portion 17a and the measured values, and a process margin range calculation portion 17d calculates process margin ranges with respect to the plurality of patterns based upon calculation results of the size variances of the respective patterns calculated by the size variations calculation portion 17c.;COPYRIGHT: (C)2010,JPO&INPIT