FRONT CHAMBER FOR SHIELD CHAMBER, AND SHIELD CHAMBER

摘要

PROBLEM TO BE SOLVED: To provide a front chamber for a shield chamber without needing a shield door having high shielding performance.;SOLUTION: The front chamber 10 for the shield chamber is formed by sharing a first sidewall 14 with the shield chamber 12. A first entrance 16 is formed on the first sidewall 14, a second entrance 22 is formed on a second sidewall 20, and none of them has any door. A partition 26 is arranged in the front chamber 10 for a shield chamber, and an opening 24 is formed at an end of the partition 26. Then the wall part of the partition 26 is located between the first entrance and the second entrance, and when viewing the second entrance 22 from the shield chamber 12 through the first entrance 16, the wall part is arranged at a position hiding the second entrance 22 by the partition 26. Shield layers each formed of a conductive material are formed in the first sidewall 14, the second sidewall 20, a ceiling wall and the partition 26 which constitutes the front chamber 10 for a shield chamber, and radiowave absorbers 28 are formed on surfaces on the interior side of the front chamber 10 for a shield chamber.;COPYRIGHT: (C)2010,JPO&INPIT