PROCESS MODEL EVALUATION METHOD, PROCESS MODEL GENERATION METHOD AND PROCESS MODEL EVALUATION PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide: a process model evaluation method capable of suitably evaluating or generating a process model; a process model generation method; and a process model evaluation program.;SOLUTION: The process model evaluation method includes: obtaining a dimensional difference amount between a first pattern formed by actually applying a process onto a plurality of prescribed patterns and a second pattern calculated based upon the plurality of prescribed patterns by applying a process model modeling the process for obtaining the first pattern from the prescribed pattern; and evaluating the process model by an evaluation index based on the number of the patterns at which the dimensional difference amount out of the second patterns is equal to or less than a threshold value.;COPYRIGHT: (C)2010,JPO&INPIT