SILICON HEATING FURNACE AND SILICON CRUSHING MACHINE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a silicon heating furnace that can prevent heating balance in a furnace from largely collapsing at the time of heater disconnection and easily performs maintenance such as heater replacement.;SOLUTION: The silicon furnace 10 is configured by cylindrically combining two cylindrical furnace halves 24a, 24b and heats a raw material, a silicon ingot 12 that is an object to be heated in its inside, wherein a plurality of linear heaters H that are formed substantially in the same length as in the bodies of the halves 24a, 24b inwardly of the two halves 24a, 24b and are covered with a quartz tube 64 are mutually spaced out in the direction of the internal circumference of the halves 24a, 24b and are disposed along the directions of the bodies of the halves 24a, 24b, and the heaters H is electrically connected to each other in parallel.;COPYRIGHT: (C)2010,JPO&INPIT