EVALUATION METHOD OF LATENT IMAGE INTENSITY DISTRIBUTION AND EVALUATION PROGRAM OF LATENT IMAGE INTENSITY DISTRIBUTION

摘要

PROBLEM TO BE SOLVED: To permit evaluation of: the stability of resist configuration formed on a substrate; and a margin due to the configuration from an optical image.;SOLUTION: A latent image intensity distribution operating unit 1a calculates a latent intensity distribution in the direction of film thickness in a resist film, based on an exposure condition and a mask pattern; an evaluation position operating unit 1b calculates an evaluation position in the direction of film thickness in the resist film based on the latent intensity distribution calculated by the operating unit 1a; and a pattern evaluation unit 1c evaluates the feature of a pattern formed on the resist film based on the latent intensity of the evaluation position calculated by the evaluation position operating unit 1b.;COPYRIGHT: (C)2010,JPO&INPIT