PREDICTION METHOD OF RESIDUAL STRESS, SPRAY FILM FORMING METHOD AND DEVICE, AND RESIDUAL STRESS PREDICTING PROGRAM

摘要

PROBLEM TO BE SOLVED: To predict a residual stress generated during spray film formation.;SOLUTION: The residual stress generated during spray film formation for forming a film by spraying spray particles onto a substrate is predicted by performing single particle analysis processes (S3, S4) for determining the first residual stress generated when a single spray particle having the first analysis condition including a temperature and speed is allowed to collide with the substrate by numerical analysis modeled by treating the substrate as a solid Lagrange's element and the spray particle as a fluid Euler's element, and a prediction process (S5) for predicting the second residual stress generated when a plurality of spray particles are allowed to collide with the substrate under the second analysis condition including the number of spray particles per unit area by superposition of the first residual stress.;COPYRIGHT: (C)2010,JPO&INPIT