APPARATUS AND METHOD OF ANALYZING FACTORS OF DRAWING POSITION ERROR

摘要

PROBLEM TO BE SOLVED: To analyze the factor generated periodically out of factors that causes pattern drawing position error.;SOLUTION: An apparatus of analyzing factors of drawing position error has: an electron beam drawing apparatus; an optical pattern coordinate measuring apparatus 31 that measures a drawing position of each factor analysis pattern on a drawn material for factor analysis that is drawn by the electron beam drawing apparatus; an operation circuit 32 that calculates an error of each drawing position of the other patterns based on the drawing position of the first drawn pattern among the respective pattern drawing positions for factor analysis measured by the optical pattern coordinate measuring apparatus 31, and calculates a relation of drawing position error of each pattern to each of the other pattern drawing time required from the time point of drawing of the first-drawn pattern; a Fourier transforming circuit 33 that carries out Fourier transform to the output of the operation circuit 32; and a display apparatus 34 that displays information based on the output of the Fourier transforming circuit 33.;COPYRIGHT: (C)2011,JPO&INPIT