Electron microscope, the method of operation electron microscope, electron microscope operation program and readable recording medium as well as the recorded instrument in the computer

摘要

PROBLEM TO BE SOLVED: To enable it to perform switching of an optical image and an electron microscope image smoothly.;SOLUTION: The electron microscope includes an electron beam image pick-up unit 42 for acquiring an electron microscope image, an optical image pick-up unit 44 for acquiring the optical image, a magnification operation part 72 which can calculate a switchable switching magnification from the optical image pick-up unit 44 to the electron beam image pick-up unit 42 based on the calculated minimum magnification by calculating the minimum magnification acquirable in this electron beam image pick-up unit 42 in response to the observation conditions, and a switching unit 46 for controlling an electron microscope magnification setting unit 611A so that, when the optical image acquired in the optical image pick-up unit 44 is displayed on a display 28, at the time when the display magnification of the optical magnification setting unit 611B reaches the switching magnification calculated by the magnification operation unit 72 so that the display magnification of the electron microscope image is set to the switching magnification, the electron microscope image is displayed by the display of the display unit 28 by switching to the display by the electron beam image pick-up unit 42 from the display by the optical image pick-up unit 44 to the indication by the electron image pick-up unit 42 and displaying the electron microscope image.;COPYRIGHT: (C)2006,JPO&NCIPI