MANUFACTURING METHOD OF INDIUM TIN OXIDE LAYER, AND MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To solve a problem that, when an ITO layer is used as a transparent electrode, there is a case wherein a foreign matter having conductivity is formed and if such foreign matter is generated, it penetrates through an organic light-emitting layer of a thickness of several tens of nm in the organic EL device, and makes electrical short circuit with a counter electrode to generate a region which is not displayed, and that in the region which is connected by a wiring with a location electrically short-circuited, a linear defect is generated by the voltage drop caused by electrical short circuit and becomes a factor to deteriorate the display quality.;SOLUTION: The ITO layer is washed by hot water having a temperature of 30°C or more and 60°C or less. The foreign matter produced secondarily at the time the ITO layer is formed has a different composition to the ITO, and contains an oxide of excessive tin, thereby it reacts with hot water and is separated from the ITO layer. On the other hand, the ITO layer has resistance to the hot water, thereby the foreign matter can be removed selectively.;COPYRIGHT: (C)2010,JPO&INPIT