SEMICONDUCTOR OPTICAL FUNCTION ELEMENT, ITS MANUFACTURING METHOD, AND ELECTRO-ABSORPTION TYPE OPTICAL MODULATOR INTEGRATED SEMICONDUCTOR LASER

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor optical function element which can have a small element resistance and a low reflection factor, and a method of manufacturing the semiconductor optical function element, and an electro-absorption type optical modulator integrated semiconductor laser.;SOLUTION: A semiconductor optical function element 10 includes a semiconductor laser 11 for emitting light having a predetermined wavelength, and an electro-absorption type modulator 13 which is formed on the same substrate as the semiconductor laser and which has an inverted mesa shape optical waveguide 17 whose side surface is curved with a predetermined curvature. The formation of the waveguide of the inverted mesa shape enables the element to have a small element resistance. The curved side surface of the waveguide of the inverted mesa shape prevents light reflected at the end face from entering again the waveguide, thus reducing its reflection factor.;COPYRIGHT: (C)2010,JPO&INPIT