PROCESS FOR FORMING CERAMIC OXIDE MATERIAL WITH PYROCHLORE STRUCTURE HAVING HIGH DIELECTRIC CONSTANT AND IMPLEMENTATION OF THE PROCESS FOR APPLICATION IN MICROELECTRONICS

摘要

PPROBLEM TO BE SOLVED: To provide a process of obtaining a material having a high dielectric constant and a low dielectric loss tangent, in a process of forming a ceramic oxide material that can function as a dielectric material of electronic parts without using temperature degrading peripheral parts. PSOLUTION: The process relates to a process for forming a lead-based ceramic oxide dielectric material comprising at least one pyrochlore crystalline phase, the process comprising: (a) a step of depositing at least one amorphous layer of the lead-based ceramic oxide material on a substrate; and (b) a crystallization annealing step carried out on the amorphous layer at a temperature not exceeding 550C, by means of which a lead-based ceramic oxide dielectric material comprising at least one pyrochlore crystalline phase is obtained. PCOPYRIGHT: (C)2010,JPO&INPIT