FILM FORMATION METHOD, FILM OF SOLID MATERIAL MANUFACTURED BY THE METHOD AND COMPOSITE STRUCTURE USING THE FILM, SPRAY PROCESSING APPARATUS FOR FILM FORMATION, AND NEGATIVE ELECTRODE MATERIAL OF LITHIUM ION BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a film formation method capable of stably forming a solid material film on a substrate at room temperature and normal pressure without using a supersonic nozzle, decompression equipment and the like.;SOLUTION: The film formation method includes spraying a solid particulate with air jet flow from the nozzle, striking the particulate on the substrate at a speed lower than sonic speed, and forming the film of the solid material on the substrate in such environments as room temperature and normal pressure. The solid particulate G in this film formation method includes a first material G₁₁ as a nucleus and a second material G₁₂ covering the external surface of the first material. The second material G₁₂ is characterized by comprising the material having a function to inhibit the cohesion of the particulates.;COPYRIGHT: (C)2010,JPO&INPIT