DENSE DIELECTRIC MATERIAL FOR HIGH FREQUENCY HAVING HIGH HEAT CONDUCTIVITY AND LOW DIELECTRIC LOSS, MANUFACTURING METHOD THEREOF AND MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a low-loss, dense, dielectric material which has a low dielectric loss and high heat conductivity in a high-frequency region, a manufacturing method thereof, and a member thereof.;SOLUTION: The low-loss, dense, dielectric material for high frequency comprises a silicon nitride sintered compact essentially comprising silicon nitride and comprising an alkaline earth metal compound, a group 3a compound in the periodic table and impurity oxygen, provided that the grain boundaries in the sintered compact are crystallized. The dielectric material has a dielectric loss of ≤5×10^-4 and a thermal conductivity of ≥50 W×m^-1×K^-1 in 2 GHz and 3 GHz and has a porosity of 3%. The manufacturing method thereof and the member thereof are also provided. The dense dielectric material for high frequency which has high heat conductivity and low dielectric loss and the member thereof provided here are used for an apparatus that generates plasma mainly by using high-frequency radiation such as microwave in an apparatus for manufacturing a semiconductor or a liquid crystal.;COPYRIGHT: (C)2010,JPO&INPIT