HEIGHTENING OF SENSITIVITY OF METHOD FOR DETECTING DEFECT

摘要

PROBLEM TO BE SOLVED: To provide a device having a small device scale, allocating surely a defect of an observation object into a visual field of an electron microscope or the like, concerning a device for observing minutely by the electron microscope or the like, a defect detected by an optical defect inspection device or an optical appearance inspection device.;SOLUTION: The electron microscope 5 for observing a defect detected by the optical defect inspection device or the optical appearance inspection device has a constitution wherein an optical microscope 14 for re-detecting the defect is loaded, and a distribution polarization element and a space filter are inserted onto a pupil surface when performing dark field observation by the optical microscope 14.;COPYRIGHT: (C)2010,JPO&INPIT