Ion implantation simulation apparatus, ion implantation simulation method, and ion implantation simulation program

摘要

The group creation part divides n ion particles into groups of a group GSUB1/SUB, a group G 2 , . . . , and a group GSUBk/SUB. The individual area setting part sets an initial condition calculation area 1 a, as an individual area of the group GSUB1/SUB, and makes the calculation part calculate movement of the ion particle. Then, one by one, the individual area setting part sets an individual area of a group GSUBi+1/SUB, based on a range Rp, a dispersion sigmaL, etc. indicating a calculation result of an ion particle belonging to the group GSUBi/SUB. Further, the individual area setting part implants an ion particle belonging to the group GSUBi+1 /SUBinto the individual area of the group GSUBi+1 /SUBand makes the calculation part calculate movement of the implanted ion particle.