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Being the exposure device which irradiates the spot of the desire which is on
Being the exposure device which irradiates the spot of the desire which is on
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机译:作为一种照射装置,可以照亮所希望的部位
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摘要
An exposing apparatus for irradiating desired spots on a substrate to be exposed relatively moving with respect to two or more light sources arranged along the direction of the relative movement to form a desired exposure pattern using the light sources comprises a control means for controlling the turning-on of only specific light sources out of the two or more light sources at a specific timing.
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