SOLID-STATE IMAGING ELEMENT FOR SOFT X-RAY, AND METHOD FOR DESIGNING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a surface irradiation type solid-state imaging element for soft X-ray allowing a signal charge transfer electrode to be thinned, and to provide a method for designing the same.;SOLUTION: A solid-state imaging element for soft X-ray includes: a photoelectric conversion section in which the light incident on the surface of a semiconductor substrate generates a signal charge; and a signal charge transfer electrode formed on the semiconductor substrate through a gate insulating film. The signal charge transfer electrode is formed of a material with a physical quantity k/ρ obtained by dividing its extinction coefficient k by specific resistance ρ showing a relatively high numerical value in a required wavelength region.;COPYRIGHT: (C)2010,JPO&INPIT