Mediating the optical type two-dimensional and 3 dimensional form

摘要

The present invention relates to an optical two-dimensional and three-dimensional shape measuring system, and more particularly, to a CCD camera mounted on an inner top of a probe case and for obtaining two-dimensional and three-dimensional image information of a measurement object through an imaging lens, and said CCD camera A first illuminating portion which is mounted below the lamella and illuminates the measuring surface of the measuring object when measuring a two-dimensional shape, and is mounted on an imaging hole formed on the bottom surface of the probe case under the first illumination portion, and illuminates the corner portion of the measurement object when measuring the two-dimensional shape 2 illuminated portions, mounted on one side of the probe case, and measuring the three-dimensional shape of the measurement object, a third illumination section for illuminating the measurement surface of the measurement object through a projection grating, a projection lens, a total reflection mirror, and the imaging aperture, and the projection grating are moved slightly It is characterized by a PZT actuator. Accordingly, by selecting a measurement method, the two-dimensional and three-dimensional shape measurements for the object can be performed selectively or alternately, and the reference grating is not used and the projection grating is not usedBy measuring the three-dimensional shape alone, the measurement error can be minimized.