Production of reflective optics and reflective optics

摘要

A method of fabricating a reflective optical system, comprising: (a) providing at least a first mandrel and a second mandrel, each of the mandrels having an extension axis and having a negative reflecting surface at one end thereof. (C) having a concave end surface configured in shape, and (c) rigidly and releasably attaching the first mandrel and the second mandrel to each other, thereby forming a mandrel assembly, and (d) a mandrel Positioning the assembly in an electroforming bath and performing an electroforming operation for a predetermined period of time, thereby forming an optical system on the mandrel assembly; and (e) separating the mandrel assembly from the optical system. And the optical system has at least first and second elongated hollow portions, each hollow portion having an axis that coincides with the extension axis of the respective mandrel. Each hollow portion has a first end provided with a reflecting surface corresponding to the concave end surface of the respective mandrel and an open second end, and at least first and second elongated hollow portions Wherein the axis is oriented such that the optical path is defined between the second ends by reflection at the reflecting surface. The method may include providing an intermediate mandrel provided between the first mandrel and the second mandrel. Also disclosed is a reflective optical system obtainable by this method, the reflective optical system having at least first and second electroformed elongated hollow portions, each hollow portion having an open end. In addition, a reflection surface is provided at the end opposite to the opening end, and the reflection surface is arranged and oriented so that the optical path is defined between the opening ends. The fabricated optics can be used as an afocal relay or used in many imaging or lithographic applications.