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Laser trimming evaluation method and laser intensity setting method for laser trimming
Laser trimming evaluation method and laser intensity setting method for laser trimming
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机译:激光微调的激光微调评价方法和激光强度设定方法
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摘要
A method of evaluating laser trimming of a semiconductor device having a thin film resistor is disclosed. The method includes the steps of providing the thin film resistor and laser trimming the thin film resistor by creating a first trim cut. The first trim cut bisects the thin film resistor such that the thin film resistor is divided into a first portion and a second portion. Also, the method involves measuring the insulation resistance of the thin film resistor. In addition, the method involves evaluating the trim cut based on the measured insulation resistance.
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