Being electrochemistry mechanical grinding manner and

摘要

Method and the device in order to remove the material from microminiature processed ones are disclosed. With one execution form, it makes microminiature processed ones the grinding surface of grinding medium contact, the 1st and 2nd electrode one side alienate makes from processed ones at least, the 1st and 2nd electrode puts in electric communication state. It arranges the grinding liquid, with the grinding surface and processed ones, it makes move one side, processed ones and the grinding surface vis-a-vis at least on the other hand. The material is removed from microminiature processed ones, the grinding liquid part the grinding surface is let flow to one concave section at least at least, with the aspects of the concave section which because of this confronts in microminiature processed ones and microminiature processed ones the air gap is arranged in the grinding liquid. Selective figure Figure 2