And calibration method compensates child spectroscopic ellipsometer system, a rotatable take discrete polarization states

摘要

I discloses a spectral reflectometer meter / ellipsometer complex systems and spectroscopic ellipsometer,. During the data collection, the polarizer element (P) and analyzer elements (A), a beam of the electromagnetic radiation, the spectroscopic ellipsometer system portion is continuously changed is remains fixed in position which is rotated as opposed to, and a (DSP) electromagnetic beam transmission means it is possible to bring the polarization state discrete sequential multiple compensator rotatable in steps. In addition, in conjunction with the application of mathematical regression methods and procedures to provide a mathematical model of the spectroscopic ellipsometer system, for sample for each system is distinguished ellipsometric of multiple, discrete stroked sequential multiple , discloses includes collecting spectroscopic data in the polarization state of the beam of electromagnetic radiation such, the operating procedure of the spectroscopic ellipsometer system portion of the present invention.