Plasma generation support device in the plasma generating device and atmospheric pressure at atmospheric pressure

摘要

PROBLEM TO BE SOLVED: To provide a plasma generation method in atmospheric pressure capable of relatively easily igniting and keeping plasma in the atmospheric pressure without needing facilities for pressure reduction; and to provide its device.;SOLUTION: An antenna member having conductivity is arranged in a processing space 20a surrounded by a conductive material with the inside set at atmospheric pressure so that its length in the processing space is set to a predetermined length Lver and one end in the processing space is grounded to the conductive material; and microwaves are radiated into the processing space to generate plasma. The processing space 20a surrounded by the conductive material with the inside set at atmospheric pressure, the antenna member 30 and a microwave generation means 10 are provided; the microwave generation means 10 radiates microwaves into the processing space 20a; and the antenna member 30 has conductivity, has a nearly columnar shape, and is so installed that the one end thereof in the processing space is grounded to the conductive material and the length thereof in the processing space 20a is set to the predetermined length Lver.;COPYRIGHT: (C)2006,JPO&NCIPI