LAYOUT EVALUATION DEVICE, LAYOUT EVALUATION PROGRAM, DUMMY RULE GENERATION DEVICE, AND DUMMY RULE GENERATION PROGRAM

摘要

PPROBLEM TO BE SOLVED: To perform flat evaluation to each circuit layout at high speed to support dummy fill. PSOLUTION: Wiring density, a total perimeter length of wiring, and a range of density difference maximum value where a height variation when CMP (Chemical Mechanical Polishing/Chemical Mechanical Planarization) is performed to a layout pattern is an upper limit are obtained as a critical region. Then, mesh division of an input layout is performed to calculate wiring density, the total perimeter length of wiring, and the density differential maximal value of each mesh as mesh data, and a critical map showing whether or not mesh data of each mesh are in the critical region and a predicted value of the height variation of the whole pattern are calculated. PCOPYRIGHT: (C)2010,JPO&INPIT