Arc atomization coat application and one where the trench of design null one or more

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for forming coating on a sputter chamber workpiece.;SOLUTION: The apparatus generally includes a sputter chamber having at least one workpiece. At least one workpiece generally includes one or more trenches formed therein, and the trenches are configured to define an arc spray coating region. The method generally includes a step of forming one or more trenches in the workpiece, with the trenches defining a coating region, and a step of applying metal coating to the coating region by arc spraying.;COPYRIGHT: (C)2005,JPO&NCIPI