FILM THICKNESS MEASURING INSTRUMENT AND FILM THICKNESS MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a film thickness measuring instrument measuring a film thickness with higher accuracy.;SOLUTION: A modeling part 721A renews film thicknesses d₁ of a first layer in order according to a parameter renewing order from a fitting part 722A to renew a function representing theoretical reflectivity according to film thicknesses d₁ after the renewal. Further, the modeling part 721A repeatedly calculates theoretical reflectivity (spectrum) at respective wavelengths according to the renewed function. Under such a procedure, the film thicknesses d₁ of the first layer are determined by fitting. If the fitting does not converge within a stipulated number of times, the film thicknesses d₁ of the first layer are determined by using Fourier transformation.;COPYRIGHT: (C)2010,JPO&INPIT