METAL THIN FILM FORMING METHOD FOR MICROSCOPIC OBSERVATION SAMPLE FOR SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To form a metal thin film with high adhesion onto an electrical insulating sample by a simple method; to emit efficiently secondary electrons by reducing charge of the electrical insulating sample by an electron beam irradiated from a SEM, and to make an emission direction constant, when forming the metal thin film on the surface of the electrical insulating sample to be observed microscopically by the SEM; and to thereby observe microscopically, clearly and highly accurately the surface of the electrical insulating sample.;SOLUTION: Before forming the metal thin film on the surface of the electrical insulating sample, in the state where hydrocarbon gas is introduced into a chamber, a voltage is applied between both electrodes to generate glow discharge, and to thereby ionize a hydrocarbon component, and a hydrocarbon film is formed on the surface of the electrical insulating sample.;COPYRIGHT: (C)2010,JPO&INPIT