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Temperature control plate and thermal transfer press machine

机译:温控板及热转印压机

摘要

I heat the temperature control plate 16 is passed through the steam in the flow path of the temperature control plate 16 a pair. Formed in plural with a predetermined interval along the longitudinal direction of the temperature control plate 16, the channel 163 is formed in a substantially circular shape. In addition, the channel 163 is located substantially at the center in the thickness direction of the temperature control plate 16. Therefore, since the temperature control plate 16 is formed symmetrically with respect to the thickness direction, and the heat of the temperature control plate 16, it can be prevented satisfactorily warping during cooling. In this way, I can be transferred well to the substrate 5 with uneven pattern of the stamper 17.
机译:加热后,温度调节板16通过一对蒸汽而在温度调节板16的流路中通过。通道163沿着温度控制板16的纵向以预定间隔形成为多个,并且形成为大致圆形。另外,通道163大致位于温度控制板16的厚度方向上的中央。因此,由于温度控制板16相对于厚度方向对称地形成,因此温度控制板16的热量,可以防止在冷却期间令人满意地翘曲。以这种方式,可以将I很好地转印到具有压模17的不均匀图案的基板5上。

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